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AS&T

@ASTJournal

AS&T is AAAR’s official journal @AmericanAerosol and is a top tier journal dedicated to publishing the latest advances in aerosol science and technology.
Bristol, UK tandfonline.com/toc/uast20/cur… Joined July 2016
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AS&T @ASTJournal
Original paper now online: Development and experimental validation of a new cleaning model to predict the removal efficiency of 10–130 nm contaminant particles... by Seungwook Lee et al. Editor Se-Jin Yook. Aerosol Science & Technology: Vol 59/6: tandfonline.com/doi/full/10.10… #aerosols
www.tandfonline.com Development and experimental validation of a new cleaning model to predict the removal efficiency... Liquid jet spray cleaning has recently emerged as a promising method for removing nanoparticle contaminants from Si wafers in the semiconductor industry. However, its environmental benefits from no...